型号 Model No:VBF-6620
工作温度 Working temperature:1300℃
外形尺寸 Dimension:L5259xW3591xH3308 mm
有效工作尺寸 Available working size:L2300xW560xH560 mm
设备安装功率 Installtion power:315 KW
极限真空度 Ultimate pressure:≤6X10-4Pa
泄漏率 Leakage rate:≤1.33X10-4 Pa.m3/s
控温精度 Temperature control accur:≤±1°C
温度均匀度 Temperature uniformity:≤±5°C
气氛 Atmosphere:真空、氩气、氮气Vacuum、N2、Ar
发热体 Heater:石墨Graphite